Pre-Vacuumed Atmosphere Furnace
This furnace is pre-vacuumed to ensure that the oxygen content in the furnace is minimized, and then nitrogen, argon or nitrogen-hydrogen is introduced to obtain the desired heating treatment under the protection of the atmosphere. Due to its excellent atmosphere and compactness, it has been widely used in material laboratories or small batch production of semiconductors, silicon nitride and other products.
Features
- The furnace is made of alumina polycrystalline fiber, and
- the temperature field is balanced and pollution-free.
- Fully enclosed structural furnace, double-layer thickened steel plate, can bear 0.1 Mpa pressure
- The top, left, right, and back are made of 12mm solid square steel for reinforcement, and the vacuum is not deformed. The maximum vacuum can be up to -0.08MPa.
●Temperature controlling system adopts industrial precision 0.2-level intelligent instrument, PID adjustment, 50-segment programming
●The furnace door has good sealing performance. Four hand wheels lock the furnace door, and use the silicone
ring to seal. - RT～1700℃
Standard ACCESSORIES
Furnace door fire brick (except 1200 type);
High temperature gloves; tongs; manual;
Two pcs heating elements (except 1200 type),
Rotary vane vacuum pump
Aditional Accessories
Direct-connected vacuum pump;
Touch screen / computer connection software;
Crucible (multi-layer kiln furniture);
Heating element (Sic and MoSi2);
Air system (float / proton flow meter, 2 / 3 channels of gas)
